In in-line PVD sputtering systems, substrates are linearly passed beneath one or more sputter cathodes to obtain their thin film coating. This motion is facilitated by loading the substrates onto a ...

The confocal sputtering technique involves the arrangement of magnetrons inside a vacuum chamber so that it is possible to apply multiple materials onto the substrate without breaking vacuum. This ...

The planar magnetron is a typical diode mode sputtering cathode consisting of a permanent magnet array behind it. This magnet array is organized in such a fashion to provide a magnetic field that is ...

THE cathodic sputtering process has been almost completely replaced in recent years by the vacuum evaporation technique for the production of thin solid films. However, renewed interest in the ...

The MEGA coating system (multi-source magnetron sputtering system) enables the production of new types of metallic or ceramic coatings in monolithic, graded or multi-layer arrangements using 7 ...